Optical Metrology

Second semester 2021

Andrés Marrugo, PhD
Universidad Tecnológica de Bolívar

Aims and Scope

This semester course is an introduction to optical metrology. It is aimed at graduate students in the Faculty of Engineering. We will focus on the practical and theoretical aspects of techniques in optical metrology.

At the end of the lectures, one would be able to:

Useful Resources

We will be using Jupyter Python notebooks as a numerical computing and graphical platform for solving many problems in the course. To avoid installing Jupyter Python locally, I encourage you to use Google Colab.

Tutorials, review materials

Outline

This website will be updated as we go along.

Lecture 1: Introduction

We will be discussing the main aspects about metrology and why it is so important in manufacturing.

Lecture 1 slides

Additional Reading

Lecture 2: Random Data and Characterization of Measurement Systems

In this lecture we will be discussing about random data, their properties and measurement systems. We will also discuss static and dynamic characterization of measurement systems.

Lecture 2 slides

Lecture 2: Cont’d

In this lecture we focus on practical aspects and calculations of characterization of measurement systems, calibration and uncertainty via confidence interval estimation.

For the calculations we will be using Python via Jupyter notebooks. You can download the Anaconda distribution that contains Python and many more scientific packages or use Google Colab.

The notebooks for this lecture:

Exercise:

Assignment 1

Data characterization and fitting. Solve the exercises in the Illustration of confidence intervals notebook and the fitting data notebook. Submit a ZIP file (firstname-lastname.zip) with the two notebooks in .ipynb format through the upload link. Due date: 2021-08-27.

Lecture 3: Basic Optical Principles and Imaging Systems

In this lecture we will discuss the Basic Optical Principles and Imaging Systems.

Lecture 4: Methods in Surface Metrology

In this lecture we introduce several basic concepts about surface measurements and characterization. The quantification of roughness and the different roughness scores. How roughness is related to the manufacturing process.

Please read the Robust 3D surface recovery paper below.

Lecture 4 slides

Readings

Assignment 2

Surface roughness characterization. Due date: 2021-09-30.

Suplementary material for assignment 2

Projects

Lecture 5: Interferometry

In this lecture we will be discussing about the fundamentals of interferometry and its applications.

Lecture 5 slides